S. Gurumurthy et al., Excellent rectifying characteristics in Au/n-CdTe diodes upon exposure to rf nitrogen plasma, SEMIC SCI T, 14(10), 1999, pp. 909-914
Nitrogen plasma exposure (NPE) effects on indium doped bulk n-CdTe are repo
rted here. Excellent rectifying characteristics of Au/n-CdTe Schottky diode
s, with an increase in the barrier height, and large reverse breakdown volt
ages are observed after the plasma exposure. Surface damage is found to be
absent in the plasma exposed samples. The breakdown mechanism of the heavil
y doped Schottky diodes is found to shift from the Zener to avalanche after
the nitrogen plasma exposure, pointing to a change in the doping close to
the surface which was also verified by C-V measurements. The thermal stabil
ity of the plasma exposure process is seen up to a temperature of 350 degre
es C, thereby enabling the high temperature processing of the samples for d
evice fabrication. The characteristics of the NPE diodes are stable over a
year implying excellent diode quality. A plausible model based on Fermi lev
el pinning by acceptor-like states created by plasma exposure is proposed t
o explain the observations.