Mm. Mezdrogina et al., Formation of optically active centers in films of erbium-doped amorphous hydrated silicon, SEMICONDUCT, 33(10), 1999, pp. 1145-1148
We have observed photoluminescence at 1.54 mu m from a-Si:H films doped wit
h erbium of various degrees of purity. It is shown that the additional intr
oduction of oxygen activates the Er ions. The effect of silicides and defec
ts in amorphous silicon a-Si:H films and in crystalline silicon c-Si is inv
estigated. (C) 1999 American Institute of Physics. [S1063-7826(99)02310-8].