The crystallinity, the surface morphology and the optical constant of sol-gel derived thin films of BaTiO3 on SiO2/Si and Si substrates

Thin films of BaTiO3 are deposited on SiO2/Si and Si through the sol-gel ro ute. The films are characterized by means of X-ray diffraction, atomic forc e microscopy, and variable angle spectroscopic ellipsometry. The experiment results show that the 700 degrees C annealed film crystallizes into the pe rovskite BaTiO3 phase and it has a relatively smooth surface and high refra ctive index, which makes it a possible candidate for electro-optic applicat ions such as dielectrics for electroluminescence and optical waveguide devi ces.