CSD process with water-based precursor solutions for BST thin films

A CSD process with water-based precursor solutions for barium strontium tit anate (BST) thin films is presented. The water-based BST solutions suitable for the CSD were made from barium acetate, strontium acetate or barium car bonate, strontium carbonate, and tetrabutyl titanate. Water was used as a s olvent. The influenced factors for the stability in the precursors are disc ussed. X-ray diffraction analysis showed that the BST thin films obtained f rom the water-based solution have pure perovskite structure. The results of microstructure and dielectric properties of the BST thin films demonstrate that the water-based precursor solutions for the BST thin films are availa ble in CSD process.