Progress in CMOS integrated measurement systems

Selected micro- and nano-systems developed recently at the Physical Electro nics Laboratory of ETH Zurich are reviewed: (i) a fluxgate microsystem for detection of the Earth's magnetic field; (ii) a capacitive chemical sensor microsystem for detection of volatile organic compounds in air; and (iii) a parallel scanning AFM chip. The micro- and nano-systems combine sensor str uctures and read-out circuitry on a single chip and are fabricated using in dustrial CMOS technology in combination with post-processing micromachining and film deposition.