T. Akermark et G. Hultquist, OXIDATION OF SI IN 15 MBAR ISOTOPICALLY LABELED O-2 H2O-GAS MIXTURES AT 750 TO 1000-DEGREES-C/, Journal of the Electrochemical Society, 144(4), 1997, pp. 1456-1462
The oxidation of Si in 15 mbar isotopically labeled O-2/H2O-gas mixtur
es at 750 to 1000 degrees C was studied in situ by probing the gas-pha
se composition of an enclosed volume with a mass spectrometer. The exp
eriments reveal interactions between the gas phase and the oxide which
are not accessible from analyses of the solid reaction product. The d
issociation rate of O-2 was calculated from oxygen exchange reactions.
O-2 reversible arrow O-2 and O-2 reversible arrow SiO2, and compared
with the oxidation rate. In the O-2 + H2O-gas mixture, the dissociatio
n rate of H2O was calculated from the O-2 reversible arrow H2O oxygen
exchange and compared with the oxidation rate. In the oxidation proces
s, the dissociation rate of H2O decreased by a factor of more than 20.
A general discussion on the dependence of the dissociation rate on th
e oxidation rate is made in relation to different types of migrating s
pecies in various systems.