OXIDATION OF SI IN 15 MBAR ISOTOPICALLY LABELED O-2 H2O-GAS MIXTURES AT 750 TO 1000-DEGREES-C/

Citation
T. Akermark et G. Hultquist, OXIDATION OF SI IN 15 MBAR ISOTOPICALLY LABELED O-2 H2O-GAS MIXTURES AT 750 TO 1000-DEGREES-C/, Journal of the Electrochemical Society, 144(4), 1997, pp. 1456-1462
Citations number
30
Categorie Soggetti
Electrochemistry
ISSN journal
00134651
Volume
144
Issue
4
Year of publication
1997
Pages
1456 - 1462
Database
ISI
SICI code
0013-4651(1997)144:4<1456:OOSI1M>2.0.ZU;2-P
Abstract
The oxidation of Si in 15 mbar isotopically labeled O-2/H2O-gas mixtur es at 750 to 1000 degrees C was studied in situ by probing the gas-pha se composition of an enclosed volume with a mass spectrometer. The exp eriments reveal interactions between the gas phase and the oxide which are not accessible from analyses of the solid reaction product. The d issociation rate of O-2 was calculated from oxygen exchange reactions. O-2 reversible arrow O-2 and O-2 reversible arrow SiO2, and compared with the oxidation rate. In the O-2 + H2O-gas mixture, the dissociatio n rate of H2O was calculated from the O-2 reversible arrow H2O oxygen exchange and compared with the oxidation rate. In the oxidation proces s, the dissociation rate of H2O decreased by a factor of more than 20. A general discussion on the dependence of the dissociation rate on th e oxidation rate is made in relation to different types of migrating s pecies in various systems.