ANOMALOUS AUGER-ELECTRON SPECTROSCOPY RESULTS OF CHEMICAL-VAPOR-DEPOSITED DIAMOND-(111) AND (100)-SURFACES

Citation
T. Sharda et al., ANOMALOUS AUGER-ELECTRON SPECTROSCOPY RESULTS OF CHEMICAL-VAPOR-DEPOSITED DIAMOND-(111) AND (100)-SURFACES, Applied surface science, 115(1), 1997, pp. 23-27
Citations number
23
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
ISSN journal
01694332
Volume
115
Issue
1
Year of publication
1997
Pages
23 - 27
Database
ISI
SICI code
0169-4332(1997)115:1<23:AASROC>2.0.ZU;2-Y
Abstract
High resolution Auger electron spectroscopy was performed on (111) and (100) facets as well as on a microvoid of polycrystalline diamond fil ms. Auger fine structure analyses of these facets indicate anomalous l ine shapes when electron beam was focused to about 0.2 mu m diameter i n contrast to the large area scans (beam size similar to 10 x 8 mu m) which exhibit a typical Auger pattern characteristic of diamond. This unusual behavior is discussed in terms of surface reconstruction which may occur due to Auger assisted desorption of hydrogen.