T. Sharda et al., ANOMALOUS AUGER-ELECTRON SPECTROSCOPY RESULTS OF CHEMICAL-VAPOR-DEPOSITED DIAMOND-(111) AND (100)-SURFACES, Applied surface science, 115(1), 1997, pp. 23-27
Citations number
23
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
High resolution Auger electron spectroscopy was performed on (111) and
(100) facets as well as on a microvoid of polycrystalline diamond fil
ms. Auger fine structure analyses of these facets indicate anomalous l
ine shapes when electron beam was focused to about 0.2 mu m diameter i
n contrast to the large area scans (beam size similar to 10 x 8 mu m)
which exhibit a typical Auger pattern characteristic of diamond. This
unusual behavior is discussed in terms of surface reconstruction which
may occur due to Auger assisted desorption of hydrogen.