HYDROGEN SENSING IN VACUUM-SYSTEMS WITH CATALYTIC FIELD PLATE MNOS CAPACITORS

Authors
HUGHES RC BASTASZ R ELLIS WP
Citation
Rc. Hughes et al., HYDROGEN SENSING IN VACUUM-SYSTEMS WITH CATALYTIC FIELD PLATE MNOS CAPACITORS, Applied surface science, 115(1), 1997, pp. 74-79
Citations number
9
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
115
Issue
1
Year of publication
1997
Pages
74 - 79
Database
ISI
SICI code
0169-4332(1997)115:1<74:HSIVWC>2.0.ZU;2-L
Abstract
The rate of response of catalytic field plate MNOS capacitors to steps in hydrogen partial pressure in a ultra high vacuum pressure. A combi nation of light sputter cleaning and elevated sensor temperature produ ces a sensor response fast enough to be of interest in the monitoring of hydrogen partial pressures in a processing chamber.