High-resolution soft X-ray emission spectra of crystalline carbon nitride films deposited by electron cyclotron resonance sputtering

The X-ray emission spectra of crystalline carbon nitride films deposited by electron-cyclotron-resonance (ECR) plasma sputtering were observed using a high-resolution soft X-ray spectrometer at the Advanced Light Source to in vestigate the electronic structure of carbon nitride crystals. The spectral features in C K and N K X-ray emissions from the ECR-deposited carbon nitr ide films represent the highly degenerated valence orbitals and their highl y pure crystalline form. The C K and NK X-ray emission spectra were approxi mately explained based on the C2p and N2p density of states in the hybridiz ed C-N bonds. The absence of significant peak shifting in selectively excit ed C K and N K X-ray emission spectra showed that there is a fairly nondisp ersive structure between valence and conduction bands in ECR-deposited carb on nitride films.