A deep level in Te-doped Al0.5In0.5P, grown by metal organic chemical vapor
deposition, has been studied by deep level transient spectroscopy. The the
rmal activation energy was 0.24 eV, and the trap concentration was related
to Te-dopant concentration. The deep level concentration strongly increased
with elevating Te-dopant concentration. Meanwhile, the trap distribution p
rofile also presented the same distribution behavior as the Te concentratio
n profile. Therefore, the deep level in Te-doped AlInP is verified to be a
dopant-related defect.