Dependence of electrically induced strain on orientation and composition in Pb(ZrxTi1-x)O-3 films

The effect of orientation and composition on electrically induced strain an d relative permittivity of 600-nm-thick Pb(ZrxTi1-x)O-3 (PZT) films was inv estigated. High permittivity was obtained near the morphotropic phase bound ary (MPB) composition, unaffected by orientation. For films with mixed text ures of [111] and [100], the electrically induced strain was maximum near t he MPB composition. While the electrically induced strain showed a tendency to increase with increasing Zr concentration x in the films with [111] pre ferred orientation, for the Pb(Zr0.65Ti0.35)O-3 film with [111] preferred o rientation, an electrically induced strain of 0.54% was obtained under an e lectric field of 250 kV/cm.