The contact potential of GaAs pn junctions was measured by Kelvin probe for
ce microscopy (KFM). The contact potential profile of the pn junctions was
not clear in the case of no illumination. When the sample was illuminated w
ith a microscope light, the potential profile reflecting pn junctions becam
e clear. The observed surface potential was explained by taking the surface
band bending due to surface states into account.