Direct conversion of titanium alkoxide into crystallized TiO2 (rutile) using coating photolysis process with ArF excimer laser

Authors
Tsuchiya, T Watanabe, A Imai, Y Niino, H Yamaguchi, I Manabe, T Kumagai, T Mizuta, S
Citation
T. Tsuchiya et al., Direct conversion of titanium alkoxide into crystallized TiO2 (rutile) using coating photolysis process with ArF excimer laser, JPN J A P 2, 38(7B), 1999, pp. L823-L825
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
38
Issue
7B
Year of publication
1999
Pages
L823 - L825
Database
ISI
SICI code
Abstract
TiO2 (rutile) films have been successfully prepared by the coating photolys is process using ArF excimer laser irradiation at room temperature. The cho ice of the Ti-alkoxide type as the starting material and the effects of atm osphere on the product firms have been studied by Fourier transformation in frared (FT-IR) and X-ray diffraction (XRD). When using Ti(O-i-C3H7)(4) as t he starting material, rutile films were obtained by the irradiation in a dr y N-2 atmosphere, whereas amorphous films were obtained by irradiation in a ir. When using Ti(OCH2CH(C2H5)-n-C4H9)(4) as a starting material, rutile fi lms were obtained by the irradiation even in the air atmosphere. Crystalliz ation mechanism is also discussed.