Mechanical characterisation of TiN/ZrN multi-layered coatings

Ultra-microhardness, adhesion and residual-stress analysis tests were perfo rmed on reactive sputtered deposited TiN/ZrN multi-layers. Hardness values as high as similar to 3600 Vickers were achieved for this material. Scratch tests of coatings deposited on steel substrates confirmed the existence of different mechanisms associated with total adhesion failure, depending ess entially on multi-layer deposition control parameters. Stress-relaxation me asurements indicated the compressive nature of these thin films. The inhere nt mechanical characterisation was broadened regarding the induced contribu tions from film thickness, total interfacial roughness, number of bi-layers and corresponding modulation periodicity. Complementary analyses with data extracted from structural XRD studies have been undertaken. (C) 1999 Elsev ier Science S.A. All rights reserved.