Room-temperature hot electron luminescence of MOS tunnel diodes has been ex
perimentally studied. Complete radiation spectra are presented for the firs
t time for the direct-tunneling regime. Essential parameters are: oxide thi
ckness 2.0...2.5 nm, doping level 2 . 10(18) cm(-3), current density simila
r to 10(2) A/cm(2), and photon energy 0.73...3.2 eV.