Advanced cleaning for the growth of ultrathin gate oxide

Authors
Mertens, PW Bearda, T Houssa, M Loewenstein, LM Cornelissen, I De Gendt, S Kenis, K Teerlinck, I Vos, R Meuris, M Heyns, MM
Citation
Pw. Mertens et al., Advanced cleaning for the growth of ultrathin gate oxide, MICROEL ENG, 48(1-4), 1999, pp. 199-206
Citations number
41
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
48
Issue
1-4
Year of publication
1999
Pages
199 - 206
Database
ISI
SICI code
0167-9317(199909)48:1-4<199:ACFTGO>2.0.ZU;2-G