Association of high-temperature kink-effect in SIMOX SOI fully depleted n-MOSFET with bias temperature instability of buried oxide

Citation
An. Nazarov et al., Association of high-temperature kink-effect in SIMOX SOI fully depleted n-MOSFET with bias temperature instability of buried oxide, MICROEL ENG, 48(1-4), 1999, pp. 379-382
Citations number
9
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
48
Issue
1-4
Year of publication
1999
Pages
379 - 382
Database
ISI
SICI code
0167-9317(199909)48:1-4<379:AOHKIS>2.0.ZU;2-W
Abstract
A high-temperature drain current "jump" in fully depleted SOI n-channel MOS FET is reported for the first time. The phenomenon appears in the SIMOX SOI MOSFETs at temperatures above 200 degrees C after a negative voltage is ap plied to the substrate. Direct link of the current "jump" with the positive charge formation in the buried oxide (BOX) has been demonstrated. The curr ent "jump" or a front channel high-temperature kink-effect is explained by electron retrapping in the (BOX) in the vicinity of the BOX-silicon body in terface.