Negative ion source for SIMS application

The paper presents a modification of the thermal emission Cs+ ion source us ed for SIMS spectroscopy purposes. The source was modified in such a way th at both the positive ion beam (in thermal emission mode), and the negative one (in sputter mode) may be emitted by the source. The mass spectra of both beams are shown and analysed. Also comparison of t he secondary ion mass spectra obtained for negative and positive primary io n beams is presented.