Deep ion implantation: Advantages and current problems

Authors
Slowinski, B
Citation
B. Slowinski, Deep ion implantation: Advantages and current problems, NUKLEONIKA, 44(2), 1999, pp. 271-275
Citations number
7
Categorie Soggetti
Physics
Journal title
NUKLEONIKA
ISSN journal
00295922 → ACNP
Volume
44
Issue
2
Year of publication
1999
Pages
271 - 275
Database
ISI
SICI code
0029-5922(1999)44:2<271:DIIAAC>2.0.ZU;2-X
Abstract
The advantages of swift heavy ions (similar to 1 MeV/u) application for ana lysis and treating of solids in order to modify their properties are briefl y summarised. As an illustration some examples of this application are also quoted.