Comparison of permittivity of ion implanted silicon and silicon bombarded with neutrons

Authors
Zukowski, P Partyka, J Wegierek, P Kozak, M
Citation
P. Zukowski et al., Comparison of permittivity of ion implanted silicon and silicon bombarded with neutrons, NUKLEONIKA, 44(2), 1999, pp. 281-284
Citations number
3
Categorie Soggetti
Physics
Journal title
NUKLEONIKA
ISSN journal
00295922 → ACNP
Volume
44
Issue
2
Year of publication
1999
Pages
281 - 284
Database
ISI
SICI code
0029-5922(1999)44:2<281:COPOII>2.0.ZU;2-C
Abstract
The present work includes a comparison of permittivity variations in the si licon irradiated with neutrons and additionally implanted with ions, the ch anges occurring in the course of thermal annealing.