SCATTERING BY LAYERED STRUCTURES WITH ROUGH SURFACES - COMPARISON OF POLARIMETRIC OPTICAL SCATTEROMETER MEASUREMENTS WITH THEORY

A laboratory model of a layered structure with a rough upper surface ( a glass microscope slide cut with a diamond saw) is used to obtain opt ical polarimetric data. Scatterometer measurements were made of all th e Mueller matrix elements associated with Light scattered in arbitrary directions. (A preliminary measurement of scattering from a smooth op aque gold film on a silicon wafer was used to validate the calculation of the Mueller matrix elements.) These measurements are compared with corresponding analytical solutions based on the full-wave approach. P hysical interpretations of the analytical solutions that account for s cattering upon reflection and transmission across rough interfaces are given in a companion paper. The agreement between calculations and me asurements suggests that the full wave, polarimetric solutions can pro vide a reliable database for electromagnetic detection of rough surfac es in remote-sensing applications. (C) 1997 Optical Society of America .