Application of the combinatorial approach to the fabrication of a quantum well multiwavelength emitting chip

In this letter, the combinatorial approach is applied to the fabrication of a quantum well multiwavelength emitting chip. The multispecies implantatio n is accomplished with arsenic followed by proton to shift the emitting wav elength. More than 20 different emitting wavelengths can be observed from a single chip. This combinatorial method shows promise for wavelength-divisi on multiplex applications and can be used to set up a library of wavelength shifts via implantation doses and implantation species. (C) 1999 American Institute of Physics. [S0003- 6951(99)04043-7].