Using a delta-doped charge-coupled device (CCD), we have demonstrated an or
der-of-magnitude improvement in the low-energy cutoff for particle detectio
n compared to conventional solid-state detectors. Individual protons with e
nergies in the 1.2-12 keV range were successfully detected using a delta-do
ped, back-illuminated CCD. Moreover, it is shown that, by measuring the cha
rge generated by the proton, it is potentially possible to use delta-doped
CCDs to determine the energy of the incoming particle. (C) 1999 American In
stitute of Physics. [S0003-6951(99)03943-1].