Js. Lee et al., HIGHLY SENSITIVE AL0.25GA0.75AS IN0.25GA0.75AS/GAAS QUANTUM-WELL HALLDEVICES WITH SI-DELTA-DOPED GAAS LAYER GROWN BY LP-MOCVD/, Sensors and actuators. A, Physical, 57(3), 1996, pp. 183-185
Quantum-well Hall devices based on Si-delta-doped Al0.25Ga0.2As/In0.25
Ga0.75As/GaAs pseudomorphic heterostructure materials grown by the low
-pressure metal organic chemical vapour deposition (LP-MOCVD) method h
ave been successfully fabricated. A Si-delta-doped GaAs layer is intro
duced for the first time in the Hall device to reduce the thermal vari
ation of electron concentrations and to improve its temperature charac
teristics. A high electron mobility of 8100 cm(2) V-1 s(-1) with a she
et carrier density of 1.5 X 10(12) cm(-2) has been achieved at room te
mperature. A temperature coefficient of - 0.015% K-1 with a product se
nsitivity of 420 V A(-1) T-1 has been obtained. High signal-to-noise (
S/N) ratios corresponding to minimum detectable magnetic fields (B-min
) of 60 nT at 1 kHz and 110 nT at 100 Hz have been attained due to the
reduced low-frequency noise from DX centres and the high mobility, Th
ese data belong to one of the best reported results.