Evaluation of inelastic energy losses for low-energy Ne+ ions scattered from aluminum and silicon surfaces

The purpose of our work is a thorough experimental study of low-energy Ne+- ion scattering from aluminum and silicon by using an advanced mass-energy s pectrometer operated with the true scattering angle, i.e., without any elec tric fields between the target and the analyzer; this paper reports an asse ssment of inelastic energy losses. Accurate evaluation of the average inela sticity for low-energy Ne+ confirmed literature data (Q = 45 +/- 5 eV), but only for Ne+-to-Al. It was found that the mean value of inelasticity for N e+-to-Si was about 55 +/- 5 eV. Different inelastic losses for the neon pri mary-ion isotopes (Ne-20(+) and Ne-22(+)) scattered from aluminum and silic on targets, as well as for the doubly charged ions Ne2+, were evaluated. Ne w data concerning the dependence of inelasticity on the primary energy were obtained. (C) 1999 Elsevier Science B.V. All rights reserved.