High-quality Ge epilayers on Si with low threading-dislocation densities we
re achieved by a two-step ultrahigh vacuum/chemical-vapor-deposition proces
s followed by cyclic thermal annealing. On large Si wafers, Ge on Si with t
hreading-dislocation density of 2.3 x 10(7) cm(-2) was obtained. Combining
selective area growth with cyclic thermal annealing produced an average thr
eading-dislocation density of 2.3 x 10(6) cm(-2).We also demonstrated small
mesas of Ge on Si with no threading dislocations. The process described in
this letter for making high-quality Ge on Si is uncomplicated and can be e
asily integrated with standard Si processes. (C) 1999 American Institute of
Physics. [S0003-6951(99)03745-6].