Nonlinear variance model for analysis of effects of process-parameter fluctuations

Authors
Rowlands, D Dimitrijev, S
Citation
D. Rowlands et S. Dimitrijev, Nonlinear variance model for analysis of effects of process-parameter fluctuations, ELECTR LETT, 35(21), 1999, pp. 1836-1837
Citations number
9
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194 → ACNP
Volume
35
Issue
21
Year of publication
1999
Pages
1836 - 1837
Database
ISI
SICI code
0013-5194(19991014)35:21<1836:NVMFAO>2.0.ZU;2-P
Abstract
A nonlinear variance equation has been derived and applied to the threshold voltage of a 0.1 mu m SOI MOS device. The equation enabled an analysis of the effects of process-parameter fluctuations to be made. The analysis show ed that the effect of the nonlinear terms (15.48%) is more important than t he effect of the mixed term (0.02%), and almost as important as the contrib ution of the second most dominant input-process parameter (21.98%). This il lustrates the importance of the proposed nonlinear equation.