Kinetic two-dimensional modeling of inductively coupled plasmas based on ahybrid kinetic approach

In this paper, we present a two-dimensional (2-D) kinetic model for low-pre ssure inductively coupled discharges. The kinetic treatment of the plasma e lectrons is based on a hybrid kinetic scheme in which the range of electron energies is divided into two subdomains. In the low energy range the elect ron distribution function is determined from the traditional nonlocal appro ximation. In the high energy part the complete spatially dependent Boltzman n equation is solved. The scheme provides computational efficiency and enab les inclusion of electron-electron collisions which are important in low-pr essure high-density plasmas. The self-consistent scheme is complemented by a 2-D fluid model for the ions and the solution of the complex wave equatio n for the RF electric field. Results of this model are compared to experime ntal results, Good agreement in terms of plasma density and potential profi les is observed. In particular, the model is capable of reproducing the tra nsition from on-axis to off-axis peaked density profiles as observed in exp eriments which underlines the significant improvements compared to models p urely based on the traditional nonlocal approximation.