Two-dimensional modeling of a micro-cell plasma in Xe driven by high frequency

Two-dimensional simulation of a micro-cell plasma driven by high frequency at 13.56 MHz is described in Xe. The minimum sustaining voltage (V-s)(min) in an ideal infinite parallel plates at high frequency is first discussed a s a function of both pd and fd (f the applied frequency, d the electrode di stance, and p the gas pressure). As decreasing d, (V-s)(min) increases at f ixed f, while (V-s)(min) decreases with increasing fd at fixed pd in a high frequency discharge under the condition of a spatial ion trapping. A capab ility for maintaining a micro-cell plasma is investigated under fd < upsilo n(de)/pi for different two-dimensional geometry of the micro cell (upsilon( de) is the effective drift velocity of electrons). The influence of the sec ondary electron from the electrode becomes important for the maintenance of a microcell plasma and emission efficiency, A powered ring electrode and g round plate system realizes the micro-cell plasma with high density at 13.5 6 MHz.