In this paper we report on a study of SiH4/H-2 radio-frequency discharges u
sing the particle-in-cell/Monte Carlo (PIC/MC) method. A special procedure
based on the rate balance for negative ions has been developed to speed up
the simulation for this kind of electronegative discharge. The electron ene
rgy distribution function and the angular and energy distribution function
of ions arriving at the substrate have been studied at different discharge
settings (frequency, pressure, voltage, and power). The simulations show th
at the electrons are heated ohmically, so the average electron energy can b
e increased only by increasing the voltage, A high radical density, a high
and more directional ion flux, and a low average ion energy can be obtained
by a combination of a high frequency and a low RF voltage. The behavior of
the dissociation rate with the discharge parameters is consistent with the
experimentally observed consumption of SiH4. The simulated ion energy dist
ribution functions are in good agreement with experimental results.