Monte Carlo model for the argon ions and fast argon atoms in a radio-frequency discharge

A three-dimensional Monte Carlo model has been developed for the argon ions and fast argon atoms in the RF sheath of a capacitively coupled RF glow di scharge in argon, Our interest in the argon ions and fast argon atoms in th e RF sheath arises from the fact that the glow discharge under study is use d as sputtering source for analytical chemistry. This source operates at ty pical working conditions of a few torr pressure and about 10 W incoming pow er. The argon ion and atom Monte Carlo model has been coupled to a hybrid M onte Carlo-fluid model for electrons and argon ions developed before to obt ain fully self-consistent results. Typical results of this model include, a mong others, the densities, fluxes, collision rates, mean energies, and ene rgy distributions of the argon ions and atoms. Moreover, we have investigat ed how many RF cycles have to be followed before periodic steady state is r eached, and the effects of all previous RF cycles are correctly accounted f or. This is found to be the case for about 20-25 RF cycles.