It is shown that dynamical theory can be applied to analyze reflection high
energy diffraction (RHEED) data from epitaxially grown samples. First, the
theoretical description of the dynamical approach employed is presented in
detail. Then examples of experimental data successfully interpreted are gi
ven. It is demonstrated that RHEED azimuthal plots may be helpful in gainin
g detailed information on the arrangement of atoms at the surface when the
growth of samples is terminated. Furthermore, it is shown that RHEED oscill
ations recorded for one-beam conditions (i.e. at off-symmetry azimuths or a
t very low glancing angles) may be very useful in investigating growing sur
faces. Finally, we discuss how the theoretical approach used in this work i
s related to approaches employed by other researchers, and what kind of inv
estigations may help to develop RHEED further.