Microstructure imaging of C54-TiSi2 polycrystalline thin films by micro-Raman spectroscopy

The morphology of C54-TiSi2 polycrystalline films has been revealed by the micro-Raman imaging technique. This was based on the calculation of the sym metries of the Raman active vibrations of the C54-TiSi2 single crystal and subsequent polarized Raman measurements to detect and unambiguously label a ll the expected peaks. The relative intensity of two suitable peaks was mon itored and mapped on C54-TiSi2 blanket films. Grains with different orienta tion are clearly detectable, and the microstructure properties of the film can be analyzed. (C) 1999 American Institute of Physics. [S0003-6951(99)017 46-5].