Strain-imaging observation of the polarization freezing of the domains under the electrode of a Pb(Zr, Ti)O-3 film

Strain imaging is used to measure and image piezoelectric properties by det ecting electric-field-induced strains using a scanning probe microscope. In this letter, we present ferroelectric domain imaging under an electrode in a lead-zirconate-titanate (PZT) film. The imaging has been achieved by det ecting the surface force modulation caused by the electrode displacements. Observation through the electrode suppresses the effect of space charges an d enables us to investigate the PZT film in the same situation in devices. We observed the freezing of polarization of a PZT film deoxidized by atomic hydrogen produced by catalysis of platinum upper electrodes due to hydroge n annealing. (C) 1999 American Institute of Physics. [S0003-6951(99)00245-4 ].