YBa2Cu3O7-d thin films were deposited on MgO single crystals by means of an
off-axis radio-frequency magnetron sputtering method. The thickness of the
deposited films was proportional to deposition time with high precision. W
hen the thickness was under 50 nm, The critical temperature was drastically
declined. It was concluded that a deformed region existed within 50 nm fro
m the interface. (C) 1999 Elsevier Science B.V. All rights reserved.