S. Calixto et al., Ultraviolet self-generating relief micro-optical elements through crosslinking photopolymerization of liquid resins, EPJ-APPL PH, 8(1), 1999, pp. 29-35
The use of a self-processing dry photopolymer layer capable of memorizing o
ptical information as a local change in thickness, is proposed for the fabr
ication of microlenses, binary holograms and gratings. Relief micro-optical
elements are generated by direct imagewise exposure through a mask. A grad
ient of chemical composition and a gradient of surface free energy cause th
e transfer of reactive species between dark and illuminated areas. Contrary
to conventional lithographic techniques that require wet chemical post-tre
atment to remove parts of the photoresist material, the fully self-processi
ng character of this technique makes the record available in situ and immed
iately after exposure.