The convergent beam illumination method has previously been proposed in ord
er to determine the atomic arrangement in surface or interface structures o
n the sub-nanometer order. This method reduces interference fringes that ap
pear at the surface or interface, and the fine structure can be analyzed. I
n this paper, the atomic arrangement near a SrTiO3 interface is determined
from a transmission electron microscope image taken with convergent beam il
lumination. A cycloidal undulated structure can be found at the interface t
hat is caused from misorientation of two crystals on each side of the inter
face. This structure cannot be found from images taken under conventional c
ondition, and therefore, it shows that the convergent beam illumination met
hod is useful for analyzing the local structures.