Computer simulation for analysis of lattice polarity of wurtzite GaN{0001}film by coaxial impact collision ion scattering spectroscopy

Signal intensities of coaxial impact collision ion scattering spectra have been computed for c-axis-oriented GaN films at various incident angles in o rder to analyse the lattice polarity based on the three-dimensional two-ato m triple-scattering model. It was found that Ga and N signal intensities sh ow specific incident angle dependences on (0001) and (<000(1)over bar>) sur faces. The physical image of each characteristic feature in the spectra was also clarified.