S. Sonoda et al., Computer simulation for analysis of lattice polarity of wurtzite GaN{0001}film by coaxial impact collision ion scattering spectroscopy, JPN J A P 2, 38(11A), 1999, pp. L1219-L1221
Signal intensities of coaxial impact collision ion scattering spectra have
been computed for c-axis-oriented GaN films at various incident angles in o
rder to analyse the lattice polarity based on the three-dimensional two-ato
m triple-scattering model. It was found that Ga and N signal intensities sh
ow specific incident angle dependences on (0001) and (<000(1)over bar>) sur
faces. The physical image of each characteristic feature in the spectra was
also clarified.