Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology

A centro-symmetrical, monolithic three-dimensional line-motion stage was in vestigated in terms of its static and dynamic characteristics. The outer fr ame with the size of a 100 mm cube includes differently sized, concentric X /Y/Z linear motion stages. The yaw, pitch and roll of each stage are reduce d to less than 0.014 arcsec mu m(-1) by adjusting the position of the axial load. From three-axis laser-interferometer measurements, a uniaxial load l ed to linear displacement with the deviation along the other axes of less t han 0.06% of 10 mu m travel. A simple frequency spectrum for the impulse re sponse without any resonance crosstalk other than the expected resonance pe ak was obtained for each axis.