Performance of the new monomode 10 GHz ECR radiation source ELISA

A new vacuum-ultraviolet radiation source based on an electron cyclotron re sonance plasma was developed. Electron Cyclotron Resonance Light Source Ass embly (ELISA) is a 10 GHz monomode source of a compact design featuring a t unable cavity and axially positionable permanent magnets. The radiation emi ssion of the source can be detected simultaneously in the vacuum-ultraviole t (VUV) spectral range via a toroidal grating monochromator from 5 to 105 n m and in the X-ray spectral range via a Si(Li) detector. Systematic investi gations of the microwave characteristics of ELISA and of the radiation emis sion of a krypton plasma were performed at a low absorbed microwave power o f about 13 W. The dependence on the cavity tuning. on the magnet position a nd on pressure is presented. (C) 1999 Elsevier Science B.V. All rights rese rved.