Structure evolution of NdF3 optical thin films

The structure evolution characteristics of NdF3 thin films has been analyse d concerning texture and grain morphology. The structure could be classifie d according to the structure zone models, and the growth mode could be rela ted to zone T and zone II. Contamination of the films by residual gases was found to inhibit the migration of grain boundaries and therefore, zone II does not appear even at high substrate temperatures in contaminated films. Stratification by MgF2 interlayers may also result in a decrease of grain s ize and a smaller surface roughness. The correlation between deposition con ditions, stratification, growth mode and optical properties is discussed.