The propagation of nonlinear surface acoustic wave (SAW) pulses was investi
gated in anisotropic single-crystal silicon. The effects of frequency-up an
d frequency-down conversion were found to depend on the plane and direction
of SAW propagation, yielding a variety of waveforms. The formation of stee
p shock fronts that broke the covalent crystal was observed in the (112) di
rection of the Si(111) plane. Solitary behavior of surface waves was studie
d by investigating the interaction between nonlinearity and dispersion for
silicon covered with a thin oxide layer.