The contribution of the slow waves (SWs) on high-density plasma production
by m=0 helicon waves is investigated in H-2, D-2, He, N-2, Ne, Ar, and Xe p
lasmas. The density-jump is observed in all the gases used at optimum exter
nal magnetic fields B-0. The measured plasma density n(p) as a function of
B-0 peaks at a condition close to the lower-hybrid resonance in H-2, D-2, H
e, N-2, and Ne, whereas, the measured dispersion relation indicates the exc
itation of helicon wave. Dispersion relation of electromagnetic waves is so
lved using dielectric tensor elements of a cold uniform plasma including io
n terms, which shows two branches: the SW and fast (helicon) wave. The tran
sition from the ionization by SWs, which are excited in the low-density pla
sma produced by an antenna induction field, to that by helicon waves has be
en predicted to explain the mechanism to produce the high-density plasma in
the helicon wave discharges. (C) 1999 American Institute of Physics. [S107
0-664X(99)01512-8].