Sol-gel pure and Pd-doped SnO2 thin films on integrated substrates were dev
eloped to detect NO2 and CO. PdO particles are included in the film matrix
and their presence enhances the CO gas sensitivity and response time. Measu
rements of electrical conductivity showed that these films have a response
variation higher than 1000% for NO2 at temperatures in the range of about 2
00 degrees C with a detection limit near 0.1 ppm, good for air quality moni
toring. The response to CO is below 100% of the electrical variation but al
so in this case the sensor can detect very low concentration level. (C) 199
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