Nanosized thin films of tungsten-titanium mixed oxides as gas sensors

Authors
Ferroni, M Boscarino, D Comini, E Gnani, D Guidi, V Martinelli, G Nelli, P Rigato, V Sberveglieri, G
Citation
M. Ferroni et al., Nanosized thin films of tungsten-titanium mixed oxides as gas sensors, SENS ACTU-B, 58(1-3), 1999, pp. 289-294
Citations number
7
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005 → ACNP
Volume
58
Issue
1-3
Year of publication
1999
Pages
289 - 294
Database
ISI
SICI code
0925-4005(19990921)58:1-3<289:NTFOTM>2.0.ZU;2-1
Abstract
Micro-structural and electrical investigation is carried out over nanosized thin film of titanium and tungsten mixed oxides as gas-sensors. Films were prepared by r.f. reactive sputtering assisted by annealing in dry air. Ele ctron microscopy techniques and RES measurements revealed the structural fe atures of these novel film while their sensing properties were tested to NO 2, CO and methanol. These layers exhibit enhanced sensitivity and selectivi ty to NO2 with respect to previously investigated Ti-W-O films. (C) 1999 El sevier Science S.A. All rights reserved.