Micro-structural and electrical investigation is carried out over nanosized
thin film of titanium and tungsten mixed oxides as gas-sensors. Films were
prepared by r.f. reactive sputtering assisted by annealing in dry air. Ele
ctron microscopy techniques and RES measurements revealed the structural fe
atures of these novel film while their sensing properties were tested to NO
2, CO and methanol. These layers exhibit enhanced sensitivity and selectivi
ty to NO2 with respect to previously investigated Ti-W-O films. (C) 1999 El
sevier Science S.A. All rights reserved.