A SnO2 microsensor device for sub-ppm NO2 detection

Authors
Cobianu, C Savaniu, C Arnautu, A Iorgulescu, R Dascalu, D Leo, G Mazzer, M Rella, R Siciliano, P Capone, S Vasanelli, L
Citation
C. Cobianu et al., A SnO2 microsensor device for sub-ppm NO2 detection, SENS ACTU-B, 58(1-3), 1999, pp. 552-555
Citations number
5
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005 → ACNP
Volume
58
Issue
1-3
Year of publication
1999
Pages
552 - 555
Database
ISI
SICI code
0925-4005(19990921)58:1-3<552:ASMDFS>2.0.ZU;2-F
Abstract
Gas sensors based on SnO2 films deposited by sol-gel on a Si substrate have been fabricated, characterised and tested. The results of structural chara cterisation and the sensing tests have shown the validity of this technolog ical approach, which is a very promising step towards the full integration of the gas sensors in VLSI Si technology. (C) 1999 Elsevier Science S.A. Al l rights reserved.