A new generation of solid state sensors based on nanocrystalline BaTiO3 fil
ms containing various semiconducting oxides has been developed. The sensors
were fabricated from BaTiO3-based nanopowder mixtures using thick film tec
hnology and were characterized regarding their CO2-gas sensitivity at diffe
rent operation temperatures and gas environments. It was found that the sen
sors operate over a wide range of CO2 concentrations. Interfering gases hav
e only minor effects on the sensor response. By using miniaturized Al2O3-su
bstrates as carriers for the sensitive nanocrystalline layer a significant
decrease of the power and powder consumption for each sensor was achieved.
(C) 1999 Elsevier Science S.A. All rights reserved.