In recent years, optical second-harmonic generation has matured into a vers
atile and powerful technique for probing the electronic and structural prop
erties of buried solid-solid interfaces. In particular Si/SiO2 interfaces h
ave been studied extensively and significant progress has been made in unde
rstanding the sensitivity of second-harmonic generation to interface defect
s, steps, strain, roughness, electric fields, carrier dynamics, and chemica
l modifications. The macroscopic and microscopic aspects of the second-orde
r nonlinear optical effects at buried semiconductor interfaces have been tr
eated theoretically by first-principles calculations and semi-empirical mod
els. It is the aim of this review article to present a comprehensive overvi
ew of recent accomplishments, current understandings and future directions
in this field. (C) 1999 Published by Elsevier Science B.V. All rights reser
ved.