Crystallization kinetics of amorphous silicon carbide derived from polymeric precursors

Phase separation processes like nucleation, crystallization and degradation of a polymer-derived amorphous silicon carbide precursor were quantified b y means of thermoanalytical methods (DTA/TG). It is shown that the crystal size of the nanostructure could be controlled and limited by nuclei-inducin g heat treatments. Furthermore, the justification for application of the JM AK theory was partially given. A comparison to amorphous SiC processed by o ther means (ion implanted) was drawn and reveals surprising similarities. ( C) 1999 Elsevier Science B.V. All rights reserved.