Basic deposition process of single crystal/single domain PbTiO3 ferroelectric thin films

Authors
Wasa, K
Citation
K. Wasa, Basic deposition process of single crystal/single domain PbTiO3 ferroelectric thin films, ACT PHY C E, 8, 1999, pp. S122-S127
Citations number
8
Categorie Soggetti
Physics
Journal title
ACTA PHYSICA SINICA-OVERSEAS EDITION
ISSN journal
10003290 → ACNP
Volume
8
Year of publication
1999
Supplement
S
Pages
S122 - S127
Database
ISI
SICI code
1000-3290(199908)8:<S122:BDPOSC>2.0.ZU;2-M
Abstract
Thin films of (001)PbTiO3(PT), 5 - 260 nm in thickness, were grown by sputt ering on miscut (001) SrTiO3(ST) substrate with miscut angle of 1.7 degrees at 600 degrees C. The PT thin films showed a single domain/single crystal perovskite structure through a large area with a smooth surface on an atomi c scale, although the sputtered PT thin films were deformed by the two dime nsional compressive force and showed large tetragonality of c/a = 1.1 ae ro om temperature.